Overview
Piezoresistor Design and Applications provides an overview of these MEMS devices and related physics. The text demonstrates how MEMS allows miniaturization and integration of sensing as well as efficient packaging and signal conditioning. This text for engineers working in MEMS design describes the piezoresistive phenomenon and optimization in several applications.\xa0 Includes detailed discussion of such topics as; coupled models of mechanics, materials and electronic behavior in a variety of common geometric implementations including strain gages, beam bending, and membrane loading. The\xa0 text concludes with an up-to-date discussion of the need for integrated MEMS\xa0 design and opportunities to leverage new materials, processes and MEMS technology.\xa0 Piezoresistor Design and Applications is an ideal book for design engineers, process engineers and researchers.
